Sr. Engineer at Brion Technologies, a subsidiary company of ASML.
Working in Product Engineering Group, developing advanced resolution enhancement techniques (RET).
I received my BS from Peking University in China, MS from Yale University, and Ph.D from UC San Diego.For more about me, read my cv here...
The motivation of my present work is push to the ultimate limit of photolithography. When I was at UCSD, I tried to obtain features of 100 nm diameter using the modified SEM. At Cornell, with VB6, and with some tricks, 40 by 120 nm2 features can be obtained. But now, in the semiconductor industry, the MOSFET gate width is only 45 nm. And this is achieved by photo rather than ebeam lithography as I mentioned above. This is such an amazing achievement in the photolithography industry, largely due to the development and commercialization of immersion lithography and advancement modeling and correction techniques. The latter part is what I am involved in right now. Yeah.. that is right, Modeling, quite different from what I had been doing before. This is such an exciting challenge; I am sure I will have a lot of fun here.
My past research has been mostly experimental, dealing with nanomagnetic systems, such as magnetic thin films, nanodots, nanopillars, etc. I have studied exchange bias between a ferromagnet and an antiferromagnet, spin torque transfer driven by a spin polarized current, etc. Practical application of all these studies are mostly in magnetic storage, like hard drive or the upcoming magnetic random access memory (RAM).
For more information about what I did before, and what I am working on right now, go here... or you can read papers I published in my almost 6 year of magnetism studies.
I am keeping a blog, on some random things, many of which are just about movies I watched lately.
Although I have a small photo album here, I am just not a big fan of taking pictures...
So, most likely, you will not find much fun here. :(
You can find me here:
4211 Burton Dr.
Brion Technologies
Santa Clara, CA 95051Email: zhipan (at) gmail.com
Work phone: (408) 200-0595
Last updated 11/12/06